INFRARED TRANSPARENT AND ELECTRICALLY CONDUCTIVE THIN-FILM OF IN2O3

被引:15
作者
CHEN, TC
MA, TP
BARKER, RC
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D O I
10.1063/1.94199
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O59 [应用物理学];
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页码:901 / 903
页数:3
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共 12 条
[1]  
LIAW SY, 1976, IEEE T ELECTROMAGNET, V18, P148
[2]  
LIAW SY, 1975, IEEE T ELECTROMAGNET, V17, P211
[3]  
Liddel H. M., 1981, COMPUTER AIDED TECHN
[4]  
MACDONALD J, 1971, METAL DIELECTRIC MUL, pCH4
[5]  
Maudes J. S., 1980, THIN SOLID FILMS, V69, P183
[6]   ELECTRICAL-PROPERTIES OF VACUUM-DEPOSITED INDIUM OXIDE AND INDIUM TIN OXIDE-FILMS [J].
MIZUHASHI, M .
THIN SOLID FILMS, 1980, 70 (01) :91-100
[7]   PREPARATION OF IN2O3 AND TIN-DOPED IN2O3 FILMS BY A NOVEL ACTIVATED REACTIVE EVAPORATION TECHNIQUE [J].
NATH, P ;
BUNSHAH, RF .
THIN SOLID FILMS, 1980, 69 (01) :63-68
[8]   EVAPORATION OF HIGH-QUALITY IN2O3 FILMS FROM IN-2O3 IN SOURCE - EVAPORATION CHEMISTRY AND THERMODYNAMICS [J].
PAN, CA ;
MA, TP .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (09) :1953-1957
[9]   HIGH-QUALITY TRANSPARENT CONDUCTIVE INDIUM OXIDE-FILMS PREPARED BY THERMAL EVAPORATION [J].
PAN, CA ;
MA, TP .
APPLIED PHYSICS LETTERS, 1980, 37 (02) :163-165
[10]  
SABRIS AG, 1978, APPL PHYS LETT, V33, P885