MICROMACHINED SILICON CANTILEVERS AND TIPS FOR SCANNING PROBE MICROSCOPY

被引：5

作者：

BUSER, RA

BRUGGER, J

DEROOIJ, NF

机构：

[1] Institute of Microtechnology, University of Neuchâtel, CH-2000 NEUCHATEL

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 15卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(91)90252-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

引用

页码：407 / 410

页数：4

共 6 条

[1] Wickramasinghe, Scanning probe microscopy Current status and future trends, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 8, 1, (1990)
[2] Meyer, Et al., Comparative Study of Lithium Fluoride and Graphite by Atomic Force Microscopy, AFM, Proceeding of the STM Conference, (1988)
[3] Quate, Imaging with the tunneling & force Microscopes Proceeding of the IEEE Micro Electromechanical Systems, (1990)
[4] Buser, Theoretical and Experimental Investigations on Silicon Single Crystal Resonant Structures, Ph.D. Thesis, (1989)
[5] Staufer, Et al., Appl. Phys. Lett., 51, (1987)
[6] Buser, de Rooij, Very High Q-factor Resonators in Monocrystalline Silicon, Sensors and Actuators, 21-23 A, pp. 323-327, (1990)

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