HARD COATINGS BY PLASMA-ASSISTED PVD TECHNOLOGIES - INDUSTRIAL PRACTICE

被引：43

作者：

MOLL, E

BERGMANN, E

机构：

[1] Balzers AG, Liechtenstein

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 37卷 / 04期

关键词：

Coating Techniques--Vapor Deposition - Materials Testing--Hardness - Surfaces--Cleaning;

D O I：

10.1016/0257-8972(89)90085-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The historical background to the main plasma-assisted (physical vapor deposition) PVD processes is presented, emphasizing the methods in current commercial use for the production of hard coatings. Industrial practices with regard to cleaning and processing receive special attention.

引用

页码：483 / 509

页数：27

共 105 条

[61]

MOLL E, 1985, Patent No. 4555611

[62] HIGH RATE ION PRODUCTION FOR VACUUM DEPOSITION [J].

MORLEY, JR ;

SMITH, HR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06) :1377-&

[63]

MORLEY JR, 1971, Patent No. 3562141

[64]

MORRISON CF, 1984, Patent No. 4448659

[65]

MORRISON CF, 1984, Patent No. 4724058

[66]

Mularie W.M., 1985, U.S. Patent, Patent No. [4.559,125, 4559125]

[67]

MULARIE WM, 1985, Patent No. 4559121

[68]

MURAYAMA Y, 1976, Patent No. 3962988

[69] PROPERTIES OF ION PLATED OXIDE-FILMS [J].

PULKER, HK ;

HAAG, W ;

BUHLER, M ;

MOLL, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2700-2701

[70]

PULKER HK, 1986, Patent No. 4619748

← 2 3 4 5 6 7 8 9 10 11 →