AUTOMATIC CHARACTERIZATION OF LAYERS STACKS FROM REFLECTIVITY MEASUREMENTS - APPLICATION TO THE STUDY OF THE VALIDITY-CONDITIONS OF THE GRAZING X-RAYS REFLECTOMETRY

被引：58

作者：

BRIDOU, F ^{[1
]}

PARDO, BA ^{[1
]}

机构：

[1] UNIV PARIS 06,INST OPT,F-75252 PARIS 05,FRANCE

来源：

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1990年 / 21卷 / 04期

关键词：

D O I：

10.1088/0150-536X/21/4/005

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The authors describe in this paper an algorithm to determine automatically the parameters of a stack from experimental reflectivity measurement. Their worked out code allows them to study the influence of different experimental conditions, such as experimental Poisson's noise or a systematical experimental error, on the validity of the results. Their method is used to study stacks by grazing soft X-rays reflectometry.

引用

页码：183 / 191

页数：9

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