LASER ETCHING OF 0.4 MU-M STRUCTURES IN CDTE BY DYNAMIC LIGHT GUIDING

被引：14

作者：

ARNONE, C

ROTHSCHILD, M

EHRLICH, DJ

机构：

来源：

关键词：

D O I：

10.1063/1.96705

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：736 / 738

页数：3

共 14 条

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Daneu V., 1984, Laser-Controlled Chemical Processing of Surfaces Symposium, P133

[8]

EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718

[9]

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