VISUALIZATION OF SURFACE FIGURE BY THE USE OF ZERNIKE POLYNOMIALS

被引：29

作者：

EVANS, CJ

PARKS, RE

SULLIVAN, PJ

TAYLOR, JS

机构：

[1] LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

[2] UNIV ARIZONA,CTR OPT SCI,TUCSON,AZ 85721

来源：

APPLIED OPTICS | 1995年 / 34卷 / 34期

关键词：

OPTICAL TESTING; INTERFEROMETERS; ZERNIKE POLYNOMIALS; POWER SPECTRAL DENSITY;

D O I：

10.1364/AO.34.007815

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Commercial software in modern interferometers used in optical testing frequently fit the wave-front or surface-figure error to Zernike polynomials; typically 37 coefficients are provided. We provide visual representations of these data in a form that may help optical fabricators decide how to improve their process or how to optimize system assembly.

引用

页码：7815 / 7819

页数：5

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