APPLICATION OF LASER FLUORESCENCE SPECTROSCOPY BY 2-PHOTON EXCITATION INTO ATOMIC-HYDROGEN DENSITY-MEASUREMENT IN REACTIVE PLASMAS

被引：14

作者：

KAJIWARA, T ^{[1
]}

TAKEDA, K ^{[1
]}

KIM, HJ ^{[1
]}

PARK, WZ ^{[1
]}

OKADA, T ^{[1
]}

MAEDA, M ^{[1
]}

MURAOKA, K ^{[1
]}

AKAZAKI, M ^{[1
]}

机构：

[1] KYUSHU UNIV,DEPT ELECT ENGN,FUKUOKA 812,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 01期

关键词：

Degree of dissociation; Hydrogen atoms; Laser fluorescence spectroscopy; Lyman beta; Two-photon excitation;

D O I：

10.1143/JJAP.29.L154

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Density profiles of hydrogen atoms in reactive plasmas of hydrogen and methane gases were measured, for the first time, using the laser fluorescence spectroscopy by two-photon excitation of Lyman beta transition and observation at the Balmer alpha radiation. Absolute density determinations showed atomic densities of around 3×1017m-3, or the degree of dissociation to be 10-4. Densities along the axis perpendicular to the RF electrode showed peaked profiles, which were due to the balance of atomic hydrogen production by electron impact on molecules against diffusion loss to the walls. © 1990 IOP Publishing Ltd.

引用

页码：L154 / L156

页数：3

共 7 条

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