STRUCTURE AND DYNAMICS OF A MAGNETRON DC ARC PLASMA

被引：25

作者：

SLINKMAN, D ^{[1
]}

SACKS, R ^{[1
]}

机构：

[1] UNIV MICHIGAN, DEPT CHEM, ANN ARBOR, MI 48109 USA

来源：

APPLIED SPECTROSCOPY | 1990年 / 44卷 / 01期

关键词：

DC Arc Plasma - Plasma/Magnetic Field Interaction - Rotating Arc;

D O I：

10.1366/0003702904085787

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A direct-current arc plasma generator is described which uses a concentric electrode configuration and a magnetic field parallel to the electrode axis to obtain rotation of the arc current channel at a frequency in the 1-3 kHz range. The anode is a hollow graphite cylinder, and the cathode is a thoriated tungsten wire. A magnetic field of several hundred gauss is obtained from one or more ring-shaped permanent ceramic magnets. For a 5-mm anode diameter, the plasma is diffuse, and the current channel has the form of a thin radial sheet which undergoes relatively small periodic perturbations at the rotational frequency. Design features, performance data, and plasma structure are considered.

引用

页码：76 / 83

页数：8

共 23 条

[1] STUDY OF A DC ARC IN AN ALTERNATING MAGNETIC-FIELD [J].