BACKSCATTERING OF NEUTRALIZED NOBLE-GAS IONS FROM POLYCRYSTALLINE SURFACES AT BOMBARDING ENERGIES BELOW 1KEV

被引：26

作者：

GESANG, WR ^{[1
]}

OECHSNER, H ^{[1
]}

SCHOOF, H ^{[1
]}

机构：

[1] TECH UNIV CLAUSTHAL,INST PHYS,D-3392 CLAUSTHAL,BUNDES REPUBLIK

来源：

NUCLEAR INSTRUMENTS & METHODS | 1976年 / 132卷 / JAN-F期

关键词：

D O I：

10.1016/0029-554X(76)90812-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

080401 [精密仪器及机械];

摘要：

引用

页码：687 / 693

页数：7

共 22 条

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[5]

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[7]

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[8]

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[9]

SPUTTERING OF POLYCRYSTALLINE METAL-SURFACES AT OBLIQUE ION-BOMBARDMENT IN 1 KEV RANGE [J].

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ZEITSCHRIFT FUR PHYSIK, 1973, 261 (01) :37-58

[10]

ENERGY DISTRIBUTIONS IN SPUTTERING PROCESSES [J].

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ZEITSCHRIFT FUR PHYSIK, 1970, 238 (05) :433-&

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