ION-BEAM DEPOSITION OF NB AND TA REFRACTORY SUPERCONDUCTING FILMS

被引：22

作者：

FACE, DW

RUGGIERO, ST

PROBER, DE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.572125

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：326 / 330

页数：5

共 28 条

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