OPTIMIZATION OF THE DEPTH RESOLUTION IN ELASTIC RECOIL DETECTION

被引：41

作者：

PASZTI, F

SZILAGYI, E

KOTAI, E

机构：

[1] Central Research Institute for Physics, the Hungarian Academy of Sciences, H-1525 Budapest

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 54卷 / 04期

关键词：

D O I：

10.1016/0168-583X(91)95399-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Elastic recoil detection (ERD) by H-1(He-4, He-4)H-1 reaction is a fast, nondestructive method for depth profiling of hydrogen isotopes. The paper presents an experimental and theoretical study of the depth resolution under different conditions. A depth resolution of 10 nm can be achieved.

引用

页码：507 / 512

页数：6

共 17 条

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