STABILITY OF OPTICAL WAVE-GUIDES IN LINBO3, FABRICATED BY PROTON IMPLANTATION

被引：4

作者：

SALEM, SO ^{[1
]}

MORETTI, P ^{[1
]}

CANUT, B ^{[1
]}

WIRL, K ^{[1
]}

HERTEL, P ^{[1
]}

机构：

[1] UNIV OSNABRUCK,FACHBEREICH PHYS,W-4500 OSNABRUCK,GERMANY

来源：

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1993年 / 24卷 / 06期

关键词：

WAVE-GUIDES; LITHIUM NIOBATE; IONIC IMPLANTATION;

D O I：

10.1088/0150-536X/24/6/003

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Planar optical waveguides were fabricated by proton implantation at 0.8 MeV in single crystal of lithium niobate (LiNbO3 ; Y-cut). Their thermal stability was investigated by measuring the evolution of the ordinary effective indices (TE modes) on thermal annealing achieved in air and in the range of 250 to 350-degrees-C. This evolution is compared to that of the nuclear damage induced by implantation effects which is analysed by channeling Rutherford backscattering. It is shown that an optical barrier does exist and optical modes can be excited, although the lattice dammage is reduced by annealing to a value as low as the one of an unimplanted sample. Since the observed thermal stability of the waveguides is rather good, proton implantation in LiNbO3 offers high potentiality for the elaboration of optical integrated devices.

引用

页码：265 / 269

页数：5

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