FABRICATION OF OPTICAL-WAVEGUIDES BY ION-BEAM SPUTTERING

被引：14

作者：

WESTWOOD, WD ^{[1
]}

INGREY, SJ ^{[1
]}

机构：

[1] BELL NO RES,POB 3511,STN C,OTTAWA K1Y 4H7,ONTARIO,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568872

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：104 / 106

页数：3

共 9 条

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[2] VARIABLE REFRACTIVE-INDEX AND BIREFRINGENT WAVEGUIDES BY SPUTTERING TANTALUM IN O2-N2 MIXTURES [J].

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WEI, J .

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[3]

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[4]

INGREY SJ, UNPUBLISHED

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WANG, S .

APPLIED PHYSICS LETTERS, 1974, 25 (03) :164-166

[6] THIN FILMS DEPOSITED BY BIAS SPUTTERING [J].

MAISSEL, LI ;

SCHAIBLE, PM .

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[7] SPUTTERING YIELDS AT VERY LOW BOMBARDING ION ENERGIES [J].

STUART, RV ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1962, 33 (07) :2345-&

[8]

WESTWOOD WD, 1975, TANTALUM THIN FILMS

[9] THE DETERMINATION OF THE THICKNESS, DIELECTRIC CONSTANT, AND OTHER PROPERTIES OF ANODIC OXIDE FILMS ON TANTALUM FROM THE INTERFERENCE COLOURS [J].

YOUNG, L .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1958, 244 (1236) :41-53

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