PRESSURE-DEPENDENCE OF ARSENIC DIFFUSIVITY IN SILICON

被引:25
作者
NYGREN, E [1 ]
AZIZ, MJ [1 ]
TURNBULL, D [1 ]
POATE, JM [1 ]
JACOBSON, DC [1 ]
HULL, R [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.96283
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:105 / 107
页数:3
相关论文
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