REACTION-MECHANISM BETWEEN BN-SPRAYED GRAPHITE AND MOLTEN AL IN VACUUM, AND ITS APPLICATION TO THE EVAPORATION SOURCE FOR REACTIVE METALS INCLUDING AL

被引：2

作者：

JEONG, JI

LIM, BM

MOON, JH

HONG, JH

KANG, JS

LEE, YP

机构：

[1] Research Institute of Industrial Science & Technology, Pohang, 790-600

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 03期

关键词：

Graphite;

D O I：

10.1116/1.579269

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We investigated the reaction mechanism between BN-sprayed graphite and molten Al in vacuum using the various analytical tools. The interfacial compound layer was well-defined, and made mainly of AlN with underlying thin mixed layer of Al4C3 and Al8B4C7. The analysis results were interpreted in terms of the free energy of formation. We prepared the BN-sprayed and annealed graphite boat, and evaluated the performance characteristics for the evaporation of reactive metal such as Al. Extended lifetime and rate limit were obtained at a manufacturing cost of about 1% compared with current TiB2.BN boat.

引用

页码：873 / 875

页数：3