TRANSMITTANCE OF AIR-SIO2-POLYSILICON-SIO2-SI STRUCTURES

被引:12
作者
ANAGNOSTOPOULOS, C [1 ]
SADASIV, G [1 ]
机构
[1] UNIV RHODE ISLAND,DEPT ELECT ENGN,KINGSTON,RI 02881
关键词
D O I
10.1109/JSSC.1975.1050583
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:177 / 179
页数:3
相关论文
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