OPERATION OF COLD-CATHODE MAGNETRON GAUGES IN HIGH MAGNETIC-FIELDS

被引:7
作者
THOMAS, SR
GOERZ, DA
PICKLES, WL
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573968
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1736 / 1739
页数:4
相关论文
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