ATOMIC NITROGEN-PRODUCTION IN A MOLECULAR-BEAM EPITAXY COMPATIBLE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE

被引：68

作者：

VAUDO, RP

COOK, JW

SCHETZINA, JF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 02期

关键词：

D O I：

10.1116/1.587052

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The first high-resolution study of the optical emission from nitrogen plasmas produced by an ASTeX compact electron cyclotron resonance (ECR) microwave plasma source is reported. The spectroscopic results clearly show that the ECR plasma source generates an appreciable flux of nitrogen atoms, as indicated by strong atomic emission lines in the near-infrared spectral region, in addition to various species of molecular nitrogen.

引用

页码：1232 / 1235

页数：4

共 15 条

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