HARD COATINGS IN THE SYSTEM (TI, AL)(C, N) PREPARED BY PYROLYSIS OF POLYMERIC PRECURSOR FILMS

AlN or TiN precursor solutions were prepared by anodic dissolution of metallic titanium or aluminium. Thin, almost uncracked coatings of nitride ceramics, such as AIN and TiN, were prepared by pyrolysis of polymeric films on Al2O3 substrates. The formation of a homogeneous layer of an (Al, Ti)N solution was possible on SiO2 glass. With a calcination atmosphere of NH3, low carbon and oxygen content could be achieved. The X-ray diffraction data showed the possibility of producing an (Al, Ti)N solution with a cubic structure.