CENTRIFUGAL ETCHING - A PROMISING NEW TOOL TO ACHIEVE DEEP ETCHING RESULTS

被引：30

作者：

KUIKEN, HK

TIJBURG, RP

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 08期

关键词：

D O I：

10.1149/1.2120070

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1722 / 1729

页数：8

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