LARGE-AREA ZNO THIN-FILMS FOR SOLAR-CELLS PREPARED BY PHOTOINDUCED METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：29

作者：

YOSHINO, M ^{[1
]}

WENAS, WW ^{[1
]}

YAMADA, A ^{[1
]}

KONAGAI, M ^{[1
]}

TAKAHASHI, K ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT ELECT & ELECTR ENGN,MEGURO KU,TOKYO 152,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 02期

关键词：

PHOTO-MOCVD; TEXTURED ZNO; SOLAR CELLS;

D O I：

10.1143/JJAP.32.726

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Textured ZnO films with low resistivity and high transparency in a wide wavelength range from 400 nm to 1400 nm have been successfully grown by the photo-induced metalorganic chemical vapor deposition (MOCVD) technique. It was found that ultraviolet irradiation during deposition was very effective in improving the electrical properties of the films, even with a low intensity. The obtained films have a good uniformity along the 10 X 10 CM2 substrate.

引用

页码：726 / 730

页数：5

共 5 条

[1] INDIUM-DOPED ZINC-OXIDE FILMS AS TRANSPARENT ELECTRODES FOR SOLAR-CELLS
MAJOR, S
CHOPRA, KL
[J]. SOLAR ENERGY MATERIALS, 1988, 17 (05): : 319 - 327
[2] TABUCHI K, 1992, 11TH EUR PHOT SOL EN
[3] TEXTURED ZNO THIN-FILMS FOR SOLAR-CELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
WENAS, WW
YAMADA, A
KONAGAI, M
TAKAHASHI, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (3B): : L441 - L443
[4] ELECTRICAL AND OPTICAL-PROPERTIES OF BORON-DOPED ZNO THIN-FILMS FOR SOLAR-CELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
WENAS, WW
YAMADA, A
TAKAHASHI, K
YOSHINO, M
KONAGAI, M
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (11) : 7119 - 7123
[5] MOBILITY ENHANCEMENT OF TEXTURED ZNO FILMS BY ULTRAVIOLET-LIGHT IRRADIATION
YAMADA, A
WENAS, WW
YOSHINO, M
KONAGAI, M
TAKAHASHI, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (7A): : L1152 - L1154

← 1 →