EPITAXIAL DEPOSITION OF GERMANIUM BY BOTH SPUTTERING AND EVAPORATION

被引：89

作者：

KRIKORIAN, E

SNEED, RJ

机构：

来源：

关键词：

D O I：

10.1063/1.1707902

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3665 / +

页数：1

共 8 条

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[5] RHODIN TN, 1963, SINGLE CRYSTAL FILMS, P31
[6] FORMATION CONDITIONS AND STRUCTURE OF THIN EPITAXIAL GERMANIUM FILMS ON SINGLE-CRYSTAL SUBSTRATES
SLOOPE, BW
TILLER, CO
[J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (12) : 3458 - &
[7] NUCLEATION OF SILVER ON SODIUM CHLORIDE
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ROLLINS, RW
RHODIN, TN
[J]. JOURNAL OF CHEMICAL PHYSICS, 1963, 38 (11) : 2698 - &
[8] WALTON D, 1962, J CHEM PHYS, V37, P182