FLEXIBLE CARBONACEOUS AND GRAPHITIZED FILMS BY PYROLYTIC CHEMICAL-VAPOR-DEPOSITION METHOD FROM HYDROCARBONS CONTAINING OXYGEN-ATOMS

被引：10

作者：

FUKUDA, M ^{[1
]}

MIZOGAMI, S ^{[1
]}

MATSUOKA, R ^{[1
]}

NOGAMI, K ^{[1
]}

YOSHINO, K ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT ELECTR ENGN,OSAKA,OSAKA 565,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343514

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：881 / 884

页数：4

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