SUBMICROMETER RESOLUTION REPLICATION OF RELIEF PATTERNS FOR INTEGRATED OPTICS

被引：36

作者：

AUMILLER, GD ^{[1
]}

CHANDROS.EA ^{[1
]}

TOMLINSO.WJ ^{[1
]}

WEBER, HP ^{[1
]}

机构：

[1] BELL TEL LABS INC,HOLMDEL,NJ 07733

来源：

关键词：

D O I：

10.1063/1.1663087

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4557 / 4562

页数：6

共 7 条

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[3] Puech C., 1973, Optics Communications, V7, P135, DOI 10.1016/0030-4018(73)90084-9
[4] SCATTERING EFFICIENCY OF HIGH-PERIODICITY DIELECTRIC GRATINGS - EXPERIMENT
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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (06) : 685 - 688
[5] EMBOSSED OPTICAL WAVEGUIDES
ULRICH, R
TOMLINSON, WJ
WEBER, HP
CHANDROSS, EA
FRANKE, EA
[J]. APPLIED PHYSICS LETTERS, 1972, 20 (06) : 213 - +
[6] LOSS MEASUREMENTS IN THIN-FILM OPTICAL WAVEGUIDES
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DUNN, FA
LEIBOLT, WN
[J]. APPLIED OPTICS, 1973, 12 (04): : 755 - 757
[7] WEBER HP, 1972, IEEE J QUANTUM ELECT, VQE 8, P546