3-DIMENSIONAL COMPUTER MODELING OF ELECTROSTATIC AND MAGNETIC ELECTRON-OPTICAL COMPONENTS

被引:25
作者
ROUSE, J
MUNRO, E
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期
关键词
D O I
10.1116/1.584687
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:1891 / 1897
页数:7
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