ELECTRON-IMPACT DISSOCIATION OF METHANE INTO CH3 AND CH2 RADICALS .1. RELATIVE CROSS-SECTIONS

被引:47
作者
NAKANO, T
TOYODA, H
SUGAI, H
机构
[1] Department of Electrical Engineering, Nagoya University Furo-cho, Chikusa-ku Nagoya
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 11A期
关键词
METHANE; NEUTRAL RADICAL; DISSOCIATION CROSS SECTION; THRESHOLD IONIZATION; ELECTRON METHANE COLLISION; METHYL RADICAL; METHYLENE RADICAL; MASS SPECTROMETRY;
D O I
10.1143/JJAP.30.2908
中图分类号
O59 [应用物理学];
学科分类号
摘要
The abundances of primary neutral radicals CH3 and CH2 resulting from electron-impact dissociation of methane have been measured. This was accomplished with threshold-ionization mass spectrometry in a differentially pumped dual-electron-beam device. The relative partial cross sections for dissociation into CH3 and CH2 are reported for electron energies between 10 and 100 eV. A maximum cross section is found at 20-30 eV for both CH3 and CH2 radicals. At higher energies, the cross section decreases rather sharply, in particular for dissociation into the CH2 radical.
引用
收藏
页码:2908 / 2911
页数:4
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