ABSOLUTE 2-DIMENSIONAL SUB-MICRON METROLOGY FOR ELECTRON-BEAM LITHOGRAPHY

被引：44

作者：

RAUGH, MR

机构：

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1985年 / 7卷 / 01期

关键词：

D O I：

10.1016/0141-6359(85)90072-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3 / 13

页数：11

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