NUMERICAL STUDY ON CZOCHRALSKI GROWTH OF OXIDE SINGLE-CRYSTALS

被引:38
作者
OKANO, Y
FUKUDA, T
HIRATA, A
TAKANO, N
TSUKADA, T
HOZAWA, M
IMAISHI, N
机构
[1] WASEDA UNIV,DEPT CHEM ENGN,SHINJUKU KU,TOKYO 169,JAPAN
[2] TOHOKU UNIV,CHEM RES INST NONAQUEOUS SOLUT,AOBA KU,SENDAI,MIYAGI 980,JAPAN
[3] KYUSHU UNIV,INST ADV MAT STUDY,KASUGA,FUKUOKA 816,JAPAN
关键词
D O I
10.1016/0022-0248(91)90162-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A numerical study of the flow and temperature fields with non-flat melt/crystal and melt/gas interfaces during Czochralski growth of oxide single crystals was performed by the finite element method. The effects of crystal rotation rate and the strength of natural convection on the flow pattern in the melt, the temperature distribution in the melt and in the crystal, the shape of melt/crystal interface, and the crystal radius are discussed. Good agreement between the numerical results for critical crystal rotation rate in this study and the results by the order-of magnitude method in the authors' previous study was obtained.
引用
收藏
页码:94 / 98
页数:5
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