RESONANT DIAPHRAGM PRESSURE MEASUREMENT SYSTEM WITH ZNO ON SI EXCITATION
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SMITS, JG
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机构:Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth
SMITS, JG
TILMANS, HAC
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机构:Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth
TILMANS, HAC
HOEN, K
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机构:Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth
HOEN, K
MULDER, H
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机构:Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth
MULDER, H
VANVUUREN, J
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机构:Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth
VANVUUREN, J
BOOM, G
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机构:Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth
BOOM, G
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[1] Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth
The principle of measuring pressure by means of a resonant diaphragm has been studied. An oscillator consisting of an integrated amplifier with a piezoelectrically driven diaphragm in its feedback loop has been built. The oscillator frequency is accurately proportional to the square of the pressure in the range 60 to 130 Torr. The piezoelectric driving material was sputtered zinc oxide. The whole system contains the sensor chip, the analog amplifier chip and the digital chip, all in compatible technology.