EXPERIMENTAL-STUDY OF THE ELECTRICAL PERFORMANCE OF ISOLATION STRUCTURES

被引：2

作者：

COPPEE, JL

VANDEWIELE, F

机构：

来源：

IEEE ELECTRON DEVICE LETTERS | 1988年 / 9卷 / 10期

关键词：

D O I：

10.1109/55.17836

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：536 / 538

页数：3

共 11 条

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[8] ELECTRICAL PERFORMANCE AND PHYSICS OF ISOLATION REGION STRUCTURES FOR VLSI [J].

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