CHARACTERIZATION OF BURIED THIN-FILMS WITH RESONANT SOFT-X-RAY FLUORESCENCE

被引:24
作者
CARLISLE, JA
TERMINELLO, LJ
HUDSON, EA
PERERA, RCC
UNDERWOOD, JH
CALLCOTT, TA
JIA, JJ
EDERER, DL
HIMPSEL, FJ
SAMANT, MG
机构
[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
[2] UNIV TENNESSEE,KNOXVILLE,TN 37996
[3] TULANE UNIV,NEW ORLEANS,LA 70118
[4] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[5] IBM RES CORP,ALMADEN RES CTR,SAN JOSE,CA 95120
关键词
D O I
10.1063/1.115483
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:34 / 36
页数:3
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