ROLE OF OXYGEN IN REDUCING SILICON CONTAMINATION OF GAAS DURING CRYSTAL GROWTH

被引：89

作者：

WOODS, JF

AINSLIE, NG

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1963年 / 34卷 / 05期

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D O I：

10.1063/1.1729602

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：1469 / &

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