FLOATING POTENTIAL MEASUREMENTS IN THE NEAR-FIELD OF AN ION-CYCLOTRON RESONANCE HEATING ANTENNA

被引:8
作者
CAUGHMAN, JBO [1 ]
RUZIC, DN [1 ]
HOFFMAN, DJ [1 ]
机构
[1] OAK RIDGE NATL LAB,OAK RIDGE,TN 37831
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词
D O I
10.1116/1.576236
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1092 / 1098
页数:7
相关论文
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