SHORT-PULSE AMPLIFICATION AND GAIN DYNAMICS OF AN ARF-EXCIMER AMPLIFIER

被引:11
作者
MOMMA, C
EICHMANN, H
JACOBS, H
TUNNERMANN, A
WELLING, H
WELLEGEHAUSEN, B
机构
[1] Institut für Quantenoptik, Universität Hannover, Hannover 1, 3000
关键词
D O I
10.1364/OL.18.000516
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Subpicosecond pulses at 193 nm, generated by a nonresonant difference-frequency mixing process in xenon, have been amplified in an ArF excimer gain module to output energies of as much as 10 mJ. Investigations on the gain characteristics of the ArF excimer amplifier yield a saturation energy density of 1.9 mJ/cm2 and a maximum small-signal gain coefficient of 0.15 cm-1. Gain recovery measurements have been performed. A dominant gain recovery time of approximately 3 ns with indications of a small fast contribution in the picosecond range have been observed.
引用
收藏
页码:516 / 518
页数:3
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