DETECTION OF LOW-MASS IMPURITIES IN THIN-FILMS USING MEV HEAVY-ION ELASTIC-SCATTERING AND COINCIDENCE DETECTION TECHNIQUES

被引:21
作者
MOORE, JA [1 ]
机构
[1] BROCK UNIV,DEPT PHYS,ST CATHARINES,ONTARIO,CANADA
关键词
D O I
10.1063/1.321368
中图分类号
O59 [应用物理学];
学科分类号
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页码:52 / 61
页数:10
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