OXYGEN ENHANCED ADHESION OF PLATINUM FILMS DEPOSITED ON THERMALLY GROWN ALUMINA SURFACES

被引：15

作者：

BUDHANI, RC

PRAKASH, S

DOERR, HJ

BUNSHAH, RF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573619

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3023 / 3024

页数：2

共 7 条

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[2] ADHESION OF EVAPORATED METAL FILMS ON GLASS
BENJAMIN, P
WEAVER, C
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1961, 261 (1304) : 516 - +
[3] KARNOWSKY MM, 1964, REV SCI INSTRUM, V35, P10
[4] INFLUENCE OF OXYGEN ON ADHERENCE OF GOLD FILMS TO OXIDE SUBSTRATES
MATTOX, DM
[J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (09) : 3613 - &
[5] MCDONALD JE, 1965, T METALL SOC AIME, V233, P512
[6] PRAKASH S, 1985, J VAC SCI TECHNOL A, V3, P255
[7] WEYL WA, 1954, ADHESION ADHESIVES F, P34