THIN FILMS OF TITANIUM + TITANIUM OXIDE FOR MICROMINIATURIZATION

被引：5

作者：

HUBER, F

机构：

来源：

IEEE TRANSACTIONS ON COMPONENT PARTS | 1964年 / CP11卷 / 02期

关键词：

D O I：

10.1109/TCP.1964.1134997

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：38 / &

共 30 条

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[3]

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[5]

GERSTENBERG D, 1962, ELECTRON RELIAB MICR, V1, P353

[6]

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HENISCH HK, 1963, J APPL PHYS, V34, P228

[10] GRADED P-N JUNCTIONS INTHIN ANODIC OXIDE FILMS OF TITANIUM [J].

HUBER, F ;

ROTTERSMAN, M .