COMPACT GRATING INTERFEROMETER FOR PRODUCING PHOTORESIST GRATINGS WITH INCOHERENT-LIGHT

被引：4

作者：

POST, D

PATORSKI, K

NING, P

机构：

来源：

APPLIED OPTICS | 1987年 / 26卷 / 06期

关键词：

D O I：

10.1364/AO.26.001100

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1100 / 1105

页数：6

共 7 条

[1]

[Anonymous], 1982, DIFFRACTION GRATINGS

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ALFERNESS, R ;

LEITH, EN .

APPLIED OPTICS, 1975, 14 (07) :1592-1600

[3]

LEITH EN, 1984, P SOC PHOTOOPT INSTR, V503, P3

[4] MOIRE INTERFEROMETRY AT VPI-AND-SU [J].

POST, D .

[5]

POST D, 1986, HDB EXPT MECHANICS

[6] BROAD-SOURCE FRINGES IN GRATING AND CONVENTIONAL INTERFEROMETERS [J].

SWANSON, GJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1984, 1 (12) :1147-1153

[7] INTERFEROMETER BASED ON 4 DIFFRACTION GRATINGS [J].

WEINBERG, FJ ;

WOOD, NB .

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