RF SPUTTERED EPITAXIAL ZNO FILMS ON SAPPHIRE FOR INTEGRATED-OPTICS

被引：76

作者：

PARADIS, EL ^{[1
]}

SHUSKUS, AJ ^{[1
]}

机构：

[1] UNITED TECHNOL RES CTR,E HARTFORD,CT 06108

来源：

THIN SOLID FILMS | 1976年 / 38卷 / 02期

关键词：

D O I：

10.1016/0040-6090(76)90220-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：131 / 141

页数：11

共 16 条

[1]

Brady M. J., 1973, Optics Communications, V7, P390, DOI 10.1016/0030-4018(73)90062-X

[2]

CHOPRA KL, 1969, THIN FILM PHENOMENA, P233

[3] MONOLITHICALLY INTEGRATED BRAGG DEFLECTOR FOR AN OPTICAL GUIDED WAVE MADE OF ZINC-OXIDE FILM [J].

CHUBACHI, N ;

KUSHIBIK.J ;

KIKUCHI, Y .

ELECTRONICS LETTERS, 1973, 9 (10) :193-194

[4] EVALUATION OF NEW SINGLE CRYSTAL PIEZOELECTRIC MATERIALS FOR SURFACE ACOUSTIC-WAVE APPLICATIONS [J].

COLLINS, JH ;

HAGON, PJ ;

PULLIAM, GR .

ULTRASONICS, 1970, 8 (04) :218-+

[5] EPITAXIAL ZNO ON SAPPHIRE [J].

GALLI, G ;

COKER, JE .

APPLIED PHYSICS LETTERS, 1970, 16 (11) :439-&

[6] FAST ELECTROOPTIC WAVEGUIDE DEFLECTOR MODULATOR [J].

HAMMER, JM ;

CHANNIN, DJ ;

DUFFY, MT .

APPLIED PHYSICS LETTERS, 1973, 23 (04) :176-177

[7] LOW-LOSS EPITAXIAL ZNO OPTICAL WAVEGUIDES [J].

HAMMER, JM ;

WITTKE, JP ;

DUFFY, MT ;

CHANNIN, DJ .

APPLIED PHYSICS LETTERS, 1972, 21 (08) :358-&

[8]

HAMMER JM, 1973, AFALTR73333 RCA TECH

[9]

KRIKORIAN E, 1966, J APPL PHYS, V37, P3655

[10] DISPERSIVE PROPERTIES OF FUNDAMENTAL RAYLEIGH WAVE MODE (M11) IN A HETEROEPITAXIAL ZINC OXIDE FILM ON A SAPPHIRE SUBSTRATE [J].

LIM, TC ;

KRAUT, EA ;

TITTMANN, BR .

APPLIED PHYSICS LETTERS, 1970, 17 (01) :34-&

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