MICRO/NANOTRIBOLOGY AND ITS APPLICATIONS TO MAGNETIC STORAGE DEVICES AND MEMS

被引:61
作者
BHUSHAN, B
机构
[1] Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus
关键词
MICRO NANOTRIBOLOGICAL TOOLS; MAGNETIC STORAGE DEVICES; MEMS; AFM/FFM;
D O I
10.1016/0301-679X(95)92698-5
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Scanning tunnelling microscopy and atomic force microscopy/friction force microscopy are increasingly used for tribological studies ranging from atomic and molecular scales to microscales. These studies are needed to develop a fundamental understanding of interfacial phenomena on a small scale and to study interfacial phenomena in micro- and nanostructures used in magnetic storage devices, MEMS and other industrial applications. Although micro/nanotribological studies are critical to study micro/nano structures, these studies are also valuable in understanding interfacial phenomena in macrostructures to provide a bridge between science and engineering. Friction and wear on micro- and nano-scales have been found to be generally smaller compared to that at macro-scales. Therefore micro/nanotribological studies may identify regimes for ultra-low-friction and zero-wear. In this paper we present examples of micro-scale tribological measurements made on magnetic storage and MEMS components.
引用
收藏
页码:85 / 96
页数:12
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