APPLICATION OF DYNAMIC THEORY OF X DIFFRACTION IN STUDY OF BORON DIFFUSION AND OF PHOSPHORUS DIFFUSION IN SILICON CRYSTALS

被引：79

作者：

BURGEAT, J

TAUPIN, D

机构：

来源：

关键词：

D O I：

10.1107/S0567739468000124

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：99 / &

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SCHOENI, K ;

ZULEEG, R .

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SMITS, FM .

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