EVAPORATION AND DEPOSITION RATES STICKING PROBABILITY AND BACKGROUND PRESSURE DURING PRODUCTION OF THIN FILMS IN VACUUM

被引：13

作者：

SCHWARZ, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1966年 / 37卷 / 12期

关键词：

D O I：

10.1063/1.1708039

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4341 / &

共 20 条

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