ON THE OPTIMIZATION OF THE LASER ABLATION PROCESS FOR THE DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS

被引:33
作者
NORTON, MG
CARTER, CB
机构
[1] Department of Materials Science and Engineering, Cornell University, Ithaca
来源
PHYSICA C | 1990年 / 172卷 / 1-2期
关键词
D O I
10.1016/0921-4534(90)90641-Q
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pulsed-laser ablation is widely used to produce thin films of the YBa2Cu3O7-delta-superconductor. The technique consists of a number of variables which would be expected to influence film growth, it is therefore important to understand what effect the changing of these parameters will have, in order to optimize the growth process. Variation of some of the laser parameters has been shown to affect the morphology of the deposited films during the early stages of growth. For example, the growth rate was found to affect the microstructure of the film. At high growth-rates (approximately-1.5 nm/s), a mixture of c-axis and a- or b-axis oriented grains were formed, while at lower growth-rates ( <0.3 nm/s), the film was oriented exclusively with the c-axis perpendicular to the interface plane.
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页码:47 / 56
页数:10
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