EXACT ANALYTICAL SOLUTIONS AND CLOSE APPROXIMATIONS TO THE DEPTH DISTRIBUTION FUNCTION IN AES AND XPS

被引：12

作者：

DWYER, VM

RICHARDS, JM

机构：

[1] Department of Electronic and Electrical Engineering, Loughborough University of Technology, Loughborough

来源：

SURFACE AND INTERFACE ANALYSIS | 1993年 / 20卷 / 04期

关键词：

D O I：

10.1002/sia.740200402

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This paper presents an analysis of the form of the depth distribution function (DDF) for one of the only scattering cross-sections for which a solution to the Boltzmann transport equation (BTE) is readily available. In doing so we demonstrate how different approximations lead to DDFs of differing complexity. The possibility of achieving the requirement for quantitative AES and XPS of a simple yet accurate DDF is discussed.

引用

页码：271 / 275

页数：5

共 19 条

[1] SOME TOPICS IN ONE-VELOCITY NEUTRON TRANSPORT THEORY [J].