PREPARATION AND PERFORMANCE OF THIN FILM THERMOCOUPLES

[1] ABOWITZ G, 1965, SEMICOND PROD SOLID, V8, P18

[2] BEHRNDT KH, 1960, AM VACUUM S T, P137

[3] BURGER, 1930, Z PHYS, V66, P210

[4] HARRIS L, 1933, REV SCI INSTR, V5, P153

[5] HOLLAND L, 1956, VACUUM DEPOSITION TH

[6] JUSTI E, 1951, Z NATURFORSCH, VA 6, P544

[7] JUSTI E, 1951, Z NATURFORSCH, VA 6, P456

[8] THIN FILM THERMOCOUPLES FOR SUBSTRATE TEMPERATURE MEASUREMENT [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1963, 34 (01) : 106 - &

[9] REIMER L, 1957, Z NATURFORSCH, VA 12, P525

[10] Tolansky S., 1948, MULTIPLE BEAM INTERF

[1] ABOWITZ G, 1965, SEMICOND PROD SOLID, V8, P18

[2] BEHRNDT KH, 1960, AM VACUUM S T, P137

[3] BURGER, 1930, Z PHYS, V66, P210

[4] HARRIS L, 1933, REV SCI INSTR, V5, P153

[5] HOLLAND L, 1956, VACUUM DEPOSITION TH

[6] JUSTI E, 1951, Z NATURFORSCH, VA 6, P544

[7] JUSTI E, 1951, Z NATURFORSCH, VA 6, P456

[8] THIN FILM THERMOCOUPLES FOR SUBSTRATE TEMPERATURE MEASUREMENT [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1963, 34 (01) : 106 - &

[9] REIMER L, 1957, Z NATURFORSCH, VA 12, P525

[10] Tolansky S., 1948, MULTIPLE BEAM INTERF