ANALYSIS OF PHOTOTHERMAL IONIZATION SPECTRA OF SHALLOW IMPURITIES IN SILICON

被引:20
作者
BAMBAKIDIS, G [1 ]
BROWN, GJ [1 ]
机构
[1] USAF,WRIGHT AERONAUT LABS,MAT LAB,WRIGHT PATTERSON AFB,OH 45433
来源
PHYSICAL REVIEW B | 1986年 / 33卷 / 12期
关键词
D O I
10.1103/PhysRevB.33.8180
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:8180 / 8187
页数:8
相关论文
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