PARTICLE DEPOSITION ON WAFERS - A COMPARISON BETWEEN 2 MODELING APPROACHES

被引：7

作者：

PETERSON, TW ^{[1
]}

SANNES, KM ^{[1
]}

STRATMANN, F ^{[1
]}

FISSAN, H ^{[1
]}

机构：

[1] UNIV DUISBURG GESAMTHSCH, D-4100 DUISBURG, FED REP GER

来源：

关键词：

D O I：

10.1016/0021-8502(88)90186-3

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：1409 / 1412

页数：4

共 6 条

[1] A PERTURBATION MODEL FOR THE COMPUTATION OF COLLECTION EFFICIENCY FOR AXIALLY-SYMMETRIC COLLECTORS
BANKS, DO
KUROWSKI, GJ
[J]. AEROSOL SCIENCE AND TECHNOLOGY, 1984, 3 (03) : 317 - 326
[2] A METHOD OF OBTAINING AN APPROXIMATE SOLUTION OF THE LAMINAR BOUNDARY-LAYER EQUATIONS
BUSH, WB
[J]. JOURNAL OF THE AEROSPACE SCIENCES, 1961, 28 (04): : 350 - 351
[3] Dewey CF., 1967, ADV HEAT TRANSFER, P317
[4] PATANKAR SV, 1980, NUMERICAL SIMULATION
[5] Schlichting H., 1979, BOUNDARY LAYER THEOR
[6] 1984, FLUENT