SEMICONDUCTOR WAFER AND TECHNICAL FLAT PLANENESS TESTING INTERFEROMETER

被引：23

作者：

SCHWIDER, J

BUROW, R

ELSSNER, KE

GRZANNA, J

SPOLACZYK, R

机构：

来源：

APPLIED OPTICS | 1986年 / 25卷 / 07期

关键词：

D O I：

10.1364/AO.25.001117

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1117 / 1121

页数：5

共 14 条

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[9]

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[10] DIGITAL WAVE-FRONT MEASURING INTERFEROMETRY - SOME SYSTEMATIC-ERROR SOURCES [J].

SCHWIDER, J ;

BUROW, R ;

ELSSNER, KE ;

GRZANNA, J ;

SPOLACZYK, R ;

MERKEL, K .

APPLIED OPTICS, 1983, 22 (21) :3421-3432

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