LIGA MICROPUMP FOR GASES AND LIQUIDS

被引：47

作者：

RAPP, R

SCHOMBURG, WK

MAAS, D

SCHULZ, J

STARK, W

机构：

[1] Kemforschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, D-76021 Karlsruhe

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 40卷 / 01期

关键词：

D O I：

10.1016/0924-4247(94)85030-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

By combining the LIGA technique with processes used in the manufacture of micromembranes, micromembrane pumps have been built with pump chambers 100 mu m in height and with pump membrane diameters between 2 and 5 mm. The pump case is made of gold, whereas the 2.7 mu m thin pump membrane consists of titanium. The passive microvalves of the pump consist df patterned micromembranes arranged one over the other and made of titanium and polyimide by use of thin-film techniques. The micropump has been tested so far with an external pneumatic drive. Both air and water have been pumped.

引用

页码：57 / 61

页数：5

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[2]

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[3]

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[6]

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