RUTHERFORD BACKSCATTERING AND TRANSMISSION ELECTRON-MICROSCOPY ANALYSIS OF AL/ALXOY VACUUM-DEPOSITED LAMINATES

被引:6
作者
HARDWICK, DA
MAGGIORE, CJ
SPRINGER, RW
机构
关键词
D O I
10.1016/0168-583X(86)90298-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:260 / 264
页数:5
相关论文
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[3]   RATE AND PRESSURE-DEPENDENCE OF CONTAMINANTS IN VACUUM-DEPOSITED ALUMINUM FILMS [J].
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[4]   STRUCTURE AND MECHANICAL-PROPERTIES OF AL-ALXOY VACUUM-DEPOSITED LAMINATES [J].
SPRINGER, RW ;
CATLETT, DS .
THIN SOLID FILMS, 1978, 54 (02) :197-205